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[IEEE 2007 IEEE International Conference on Microelectronic Test Structures - Bunkyo-ku, Japan (2007.03.19-2007.03.22)] 2007 IEEE International Conference on Microelectronic Test Structures - A New Test Structure for Shallow Trench Isolation (STI) Depth Monitor
Wang, Qingfeng, Pendharkar, Sameer, Hu, Binghua, Russell, Bill, Jones-Williams, PamYear:
2007
Language:
english
DOI:
10.1109/icmts.2007.374449
File:
PDF, 3.13 MB
english, 2007