[IEEE 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands (25-29 Jan. 2004)] 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - Robust, large-deflection, in-plane thermal polymer V-shaped actuators
Haasl, S., Griss, P., Sohlstrom, H., Kalvesten, E., Stemme, G.Year:
2004
Language:
english
DOI:
10.1109/mems.2004.1290634
File:
PDF, 282 KB
english, 2004