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[IEEE 2014 29th Symposium on Microelectronics Technology and Devices (SBMicro) - Aracaju, Brazil (2014.9.1-2014.9.5)] 2014 29th Symposium on Microelectronics Technology and Devices (SBMicro) - Silicon nitride for nonlinear optics applications in the telecommunications C-band deposited by ECR-CVD
do Nascimento, A. R., Manera, L. T., Diniz, J. A., Silva, A. R., dos Santos, M. V. P., Cerqueira S., Arismar, Barea, L. A. M., Frateschi, N. C.Year:
2014
Language:
english
DOI:
10.1109/sbmicro.2014.6940088
File:
PDF, 834 KB
english, 2014