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[IEEE International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 - Stockholm, Sweden (June 25-29, 1995)] Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 - High Resolution Shadow Mask Patterning In Deep Holes And Its Application To An Electrical Wafer Feed-through
Burger, G.J., Smulders, E.J.T., Berenschot, J.W., Lammerink, T.S.J., Fluitman, J.H.J., Imai, S.Volume:
1
Year:
1995
Language:
english
DOI:
10.1109/sensor.1995.717289
File:
PDF, 925 KB
english, 1995