[IEEE International Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, IL, USA (16-19 June 1997)] Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - Fabrication of ultrasensitive piezoresistive cantilevers for torque magnetometry
Brugger, J., Willemin, M., Rossel, C., Beljakovic, G., Vettiger, P.Volume:
1
Year:
1997
Language:
english
DOI:
10.1109/sensor.1997.613674
File:
PDF, 210 KB
english, 1997