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[IEEE IEEE International Solid-State Sensors and Actuators Conference - Boston, MA, USA (8-12 June 2003)] TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) - A novel fabrication technology for smooth 3D inclined polymer microstructures with adjustable angles
Kuo-Yung Hung,, Heng-Tsang Hu,, Fan-Gang Tseng,Volume:
1
Year:
2003
Language:
english
DOI:
10.1109/sensor.2003.1215600
File:
PDF, 372 KB
english, 2003