[IEEE 2007 International Semiconductor Conference (CAS 2007) - Sinaia, Romania (2007.10.15-2007.09.17)] 2007 International Semiconductor Conference - Low Stress PECVD SiNx Process for Biomedical Application
Iliescu, Ciprian, Wei, Jiashen, Ong, Poh Lam, Chen, BangtaoYear:
2007
Language:
english
DOI:
10.1109/smicnd.2007.4519666
File:
PDF, 1.77 MB
english, 2007