[IEEE TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference - Anchorage, AK, USA (2015.6.21-2015.6.25)] 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Micromachined high-Q fused silica bell resonator with complex profile curvature realized using 3D micro blowtorch molding
Nagourney, T., Cho, J., Darvishian, A., Shiari, B., Najafi, K.Year:
2015
Language:
english
DOI:
10.1109/transducers.2015.7181172
File:
PDF, 10.12 MB
english, 2015