Complex 3D structures via hybrid processing of SU-8

Microelectronic Engineering 2016 / 04 Vol. 155

Complex 3D structures via hybrid processing of SU-8

Steinberg, Christian, Papenheim, Marc, Wang, Si, Scheer, Hella-Christin
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Volume:
155
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2016.01.036
Date:
April, 2016
File:
PDF, 1.35 MB
english, 2016
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