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[IEEE 7th International Conference on Solid-State and Integrated Circuits Technology, 2004. - Beijing, China (Oct. 18-21, 2004)] Proceedings. 7th International Conference on Solid-State and Integrated Circuits Technology, 2004. - A new damage model for ion implantation simulation with molecular dynamics method
Rong Wang,, Min Yu,, Kai Zhan,, Xiaokang Shi,, Huihui Ji,, Jinyu Zhing,, Oka, H.Volume:
2
Year:
2004
Language:
english
DOI:
10.1109/icsict.2004.1436689
File:
PDF, 746 KB
english, 2004