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[IEEE IECON 2014 - 40th Annual Conference of the IEEE Industrial Electronics Society - Dallas, TX, USA (2014.10.29-2014.11.1)] IECON 2014 - 40th Annual Conference of the IEEE Industrial Electronics Society - Integrated MEMS actuators for sub-Micron patterning on thin polymer films
Mehdizadeh, Emad, Pourkamali, SiavashYear:
2014
Language:
english
DOI:
10.1109/iecon.2014.7048832
File:
PDF, 1.02 MB
english, 2014