[IEEE 2014 20th International Conference on Ion Implantation Technology (IIT) - Portland, OR, USA (2014.6.26-2014.7.4)] 2014 20th International Conference on Ion Implantation Technology (IIT) - Efficient Monte Carlo simulation of ion implantation into 3D FinFET structure
Kubotera, Hiroyuki, Kayama, Yasuyuki, Nagura, Sachio, Usami, Yasutsugu, Schmidt, Alexander, Kwon, Uihui, Keun-Ho Lee,, Youngkwan Park,Year:
2014
Language:
english
DOI:
10.1109/iit.2014.6939999
File:
PDF, 969 KB
english, 2014