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[IEEE 2004 International Semiconductor Conference. CAS 2004 (IEEE Cat. No.04TH8748) - Sinaia, Romania (Oct. 4-6, 2004)] 2004 International Semiconductor Conference. CAS 2004 Proceedings (IEEE Cat. No.04TH8748) - Reliability assessment by virtual prototyping of MEMS tunable fabry-perot optical cavity
Bazu, M., Tibeica, C., Galateanu, L., Ilian, V.Volume:
1
Year:
2004
Language:
english
DOI:
10.1109/smicnd.2004.1402853
File:
PDF, 212 KB
english, 2004