Surface micromachining for transition-edge detectors

IEEE Transactions on Appiled Superconductivity 2003 / 06 Vol. 13; Iss. 2

Surface micromachining for transition-edge detectors

Hilton, G.C., Beall, J.A., Deiker, S., Beyer, J., Vale, L.R., Reintsema, C.D., Ullom, J.N., Irwin, K.D.
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Volume:
13
Language:
english
Journal:
IEEE Transactions on Appiled Superconductivity
DOI:
10.1109/tasc.2003.813989
Date:
June, 2003
File:
PDF, 984 KB
english, 2003
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