Charge Trapping and Decay Mechanism in Post Deposition...

IEEE Transactions on Device and Materials Reliability 2015 / 12 Vol. 15; Iss. 4

Charge Trapping and Decay Mechanism in Post Deposition Annealed Er2O3 MOS Capacitors by Nanoscopic and Macroscopic Characterization

Khosla, Robin, Kumar, Pawan, Sharma, Satinder K.
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Volume:
15
Language:
english
Journal:
IEEE Transactions on Device and Materials Reliability
DOI:
10.1109/tdmr.2015.2498310
Date:
December, 2015
File:
PDF, 1.08 MB
english, 2015
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