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[IEEE TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference - Anchorage, AK, USA (2015.6.21-2015.6.25)] 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Piezoelectric response optimization of multi roof tile-shaped modes in MEMS resonators by variation of the support boundary conditions
Pfusterschmied, G., Kucera, M., Wistrela, E., Steindl, W., Ruiz-Diez, V., Bittner, A., Sanchez-Rojas, J.L., Schmid, U.Year:
2015
Language:
english
DOI:
10.1109/transducers.2015.7181086
File:
PDF, 2.57 MB
english, 2015