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Origin of microplasma instabilities during DC operation of silicon based microhollow cathode devices
Felix, Valentin, Lefaucheux, Philippe, Aubry, Olivier, Golda, Judith, Schulz-von der Gathen, Volker, Overzet, Lawrence J, Dussart, RémiVolume:
25
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/25/2/025021
Date:
April, 2016
File:
PDF, 1.83 MB
english, 2016