[IEEE 2003 IEEE International Symposium on Semiconductor Manufacturing. - San Jose, CA, USA (30 Sept.-2 Oct. 2003)] 2003 5th International Conference on ASIC. Proceedings (IEEE Cat. No.03TH8690) - Reduction of AlF/sub 3/ and ALFO defects by replacing aluminum purge ring heaters with ceramic purge ring heaters in AMAT tungsten CVD systems

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