[IEEE 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2015.5.3-2015.5.6)] 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Using the low frequency component of the background signal for SiGe and Ge growth monitoring
Halder, Sandip, Schulze, Andreas, Leray, Philippe, Caymax, Matty, Bast, Gerhard, Simpson, Gavin, Ulea, Neli, Polli, MarcoYear:
2015
Language:
english
DOI:
10.1109/asmc.2015.7164442
File:
PDF, 383 KB
english, 2015