[IEEE 2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) - Cannes, France (2014.4.1-2014.4.4)] 2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) - Reliability characterization of a soot particle sensor: Analysis of stress- and electromigration in thin-film platinum
Rusanov, Radoslav, Graf, Juergen, Rank, Holger, Fuchs, Tino, Mueller-Fiedler, Roland, Kraft, OliverYear:
2014
Language:
english
DOI:
10.1109/dtip.2014.7056639
File:
PDF, 1.32 MB
english, 2014