[IEEE 2015 12th International Conference on Electrical Engineering, Computing Science and Automatic Control (CCE) - Mexico City, Mexico (2015.10.28-2015.10.30)] 2015 12th International Conference on Electrical Engineering, Computing Science and Automatic Control (CCE) - SIMS analysis of atomic composition of silicon-germanium films deposited by RF plasma discharge
Martinez, H.E., Kosarev, A., Kudriavtsev, Y.Year:
2015
Language:
english
DOI:
10.1109/iceee.2015.7357813
File:
PDF, 218 KB
english, 2015