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[IEEE 2000 22nd International Conference on Microelectronics. Proceedings - Nis, Yugoslavia (14-17 May 2000)] 2000 22nd International Conference on Microelectronics. Proceedings (Cat. No.00TH8400) - Investigation of ion-beam modified silicon by photoacoustic method
Todorovic, D.M., Nikolic, P.M., Elazar, J., Smiljanic, M., Bojicic, A.I., Vasiljevic-Radovic, D.G., Radulovic, K.T.Volume:
1
Year:
1999
Language:
english
DOI:
10.1109/icmel.2000.840566
File:
PDF, 348 KB
english, 1999