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[IEEE 2015 IEEE Sensors - Busan (2015.11.1-2015.11.4)] 2015 IEEE SENSORS - A novel high sensitivity MEMS acoustic gyroscope by measuring phase shift
Yuanyuan Yu,, Buyun Chen,, Jin Tao,, Xuejiao Chen,, Hao Zhang,, Wei Pang,, Daihua Zhang,, Hao Luo,Year:
2015
Language:
english
DOI:
10.1109/icsens.2015.7370329
File:
PDF, 359 KB
english, 2015