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[IEEE 2015 IEEE Sensors - Busan (2015.11.1-2015.11.4)] 2015 IEEE SENSORS - Wafer-level fabrication of strain gauges on PDMS membranes for low-pressure sensing
Quiros-Solano, W. F., Pandraud, G., Sarro, P. M.Year:
2015
Language:
english
DOI:
10.1109/icsens.2015.7370690
File:
PDF, 1.26 MB
english, 2015