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[IEEE 7th International Conference on Solid-State and Integrated Circuits Technology, 2004. - Beijing, China (Oct. 18-21, 2004)] Proceedings. 7th International Conference on Solid-State and Integrated Circuits Technology, 2004. - Defects in ion implantation and annealing studied by atornistic model
Min Yu,, Rong Wang,, Huihui Ji,, Xiaokang Shi,, Kai Zhan,, Yangyuan Wang,, Jinyu Zhang,, Oka, H.Volume:
2
Year:
2004
Language:
english
DOI:
10.1109/icsict.2004.1436687
File:
PDF, 1.12 MB
english, 2004