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[IEEE 1998 International Conference on Ion Implantation Technology. Proceedings. Ion Implantation Technology - 98 - Kyoto, Japan (22-26 June 1998)] 1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144) - Microanalysis of FIB induced deposited Pt films using ion microprobe
Park, Y.K., Nagai, T., Takai, M., Lehrer, C., Frey, L., Ryssel, H.Volume:
2
Year:
1998
Language:
english
DOI:
10.1109/iit.1998.813883
File:
PDF, 319 KB
english, 1998