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[IEEE 2014 20th International Conference on Ion Implantation Technology (IIT) - Portland, OR, USA (2014.6.26-2014.7.4)] 2014 20th International Conference on Ion Implantation Technology (IIT) - Instability in low energy beams extracted from BF3 plasma
Inouchi, Yutaka, Matsumoto, Takeshi, Dohi, Shojiro, Naito, MasaoYear:
2014
Language:
english
DOI:
10.1109/iit.2014.6940040
File:
PDF, 1.08 MB
english, 2014