[IEEE 2014 IEEE 14th International Conference on Nanotechnology (IEEE-NANO) - Toronto, ON, Canada (2014.8.18-2014.8.21)] 14th IEEE International Conference on Nanotechnology - Si (100) and Si (311) - A comparative study for nanofabrication
Moldovan, Nicolaie, Divan, RaluYear:
2014
Language:
english
DOI:
10.1109/nano.2014.6968099
File:
PDF, 843 KB
english, 2014