Fabrication and flow-sensor application of flexible thermal MEMS device based on Cu on polyimide substrate
Shikida, Mitsuhiro, Niimi, Yosuke, Shibata, ShunjiVolume:
23
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-015-2704-3
Date:
March, 2017
File:
PDF, 2.63 MB
english, 2017