Manufacturing of membranes by laser ablation in SiC,...

Microsystem Technologies 2016 / 7 Vol. 22; Iss. 7

Manufacturing of membranes by laser ablation in SiC, sapphire, glass and ceramic for GaN/ferroelectric thin film MEMS and pressure sensors

Zehetner, J., Kraus, S., Lucki, M., Vanko, G., Dzuba, J., Lalinsky, T.
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Volume:
22
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-016-2887-2
Date:
July, 2016
File:
PDF, 1.76 MB
english, 2016
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