MEMS-in-TEM for Nano Tribology

Journal of Physics Conference Series 2010 / 11 Vol. 258

MEMS-in-TEM for Nano Tribology

Fujita, Hiroyuki, Ishida, Tadashi, Sato, Takaaki, Nabeya, Shinsuke
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Volume:
258
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/258/1/012004
Date:
November, 2010
File:
PDF, 934 KB
english, 2010
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