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[IEEE 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 - Boston, MA, USA (30 April-2 May 2002)] 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259) - Sidewall clean effect upon titanium salicide filaments
Campbell, J.P., Boyer, M., Griffin, A.J., Imam, Z., Lee, H., Montgomery, C., Pak, R., Vialpando, B.Year:
2002
Language:
english
DOI:
10.1109/asmc.2002.1001635
File:
PDF, 413 KB
english, 2002