SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, United States (Sunday 17 August 2014)] Advances in Metrology for X-Ray and EUV Optics V - Pushing the limits: latest developments in angle metrology for the inspection of ultra-precise synchrotron optics
Assoufid, Lahsen, Ohashi, Haruhiko, Asundi, Anand K., Yandayan, Tanfer, Geckeler, Ralf D., Siewert, FrankVolume:
9206
Year:
2014
Language:
english
DOI:
10.1117/12.2060953
File:
PDF, 895 KB
english, 2014