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Oxidation-induced stacking faults and related grown-in...

Semiconductor Science and Technology 2003 / 04 Vol. 18; Iss. 4

Oxidation-induced stacking faults and related grown-in oxygen precipitates in nitrogen-doped Czochralski silicon

Yu, Xuegong, Yang, Deren, Ma, Xiangyang, Shen, Yejun, Tian, Daxi, Li, Liben, Que, Duanlin
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Volume:
18
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/18/4/334
Date:
April, 2003
File:
PDF, 323 KB
english, 2003
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