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Variation of Contact Resistivity with Ge in TiW/P + SiGe Contacts
Persson, S, Wu, D, Lindgren, A-C, Hellström, P E, Zhang, S-LVolume:
T114
Language:
english
Journal:
Physica Scripta
DOI:
10.1088/0031-8949/2004/t114/011
Date:
January, 2004
File:
PDF, 103 KB
english, 2004