Characterization of thermal treatment effects on thermal...

IOP Conference Series Materials Science and Engineering 2010 / 02 Vol. 8

Characterization of thermal treatment effects on thermal and electrical stability of low-k material

Choi, B H, Kim, Y B, Lee, J H
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Volume:
8
Language:
english
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899x/8/1/012039
Date:
February, 2010
File:
PDF, 495 KB
english, 2010
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