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[IEEE 2015 Joint Conference of the IEEE International Frequency Control Symposium & the European Frequency and Time Forum (FCS) - Denver, CO, USA (2015.4.12-2015.4.16)] 2015 Joint Conference of the IEEE International Frequency Control Symposium & the European Frequency and Time Forum - Micromechanical piezoelectric-on-silicon BAW resonators for sensing in liquid environments
Prasad, Abhinav, Seshia, Ashwin A., Charmet, JeromeYear:
2015
Language:
english
DOI:
10.1109/fcs.2015.7138825
File:
PDF, 1.70 MB
english, 2015