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[IEEE 2015 International Conference on Fluid Power and Mechatronics (FPM) - Harbin, China (2015.8.5-2015.8.7)] 2015 International Conference on Fluid Power and Mechatronics (FPM) - Research on elastic deformation compensation system for three axis air bearing platform
Xiang, Dong, Yang, Qingjun, Zhu, Dong, Liu, Changhai, Cheng, ShaoshuaiYear:
2015
Language:
english
DOI:
10.1109/fpm.2015.7337155
File:
PDF, 473 KB
english, 2015