Development of dynamic 3-D surface profilometry using...

Development of dynamic 3-D surface profilometry using stroboscopic interferometric measurement and vertical scanning techniques

Fan, Kuang-Chao, Chen, Liang-Chia, Lin, Chi-Duen, Chang, Calvin C, Kuo, Ching-Fen, Chou, Jung-Tsung
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Volume:
13
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/13/1/012
Date:
January, 2005
File:
PDF, 628 KB
english, 2005
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