Indigenous development of ultra high vacuum (UHV) magnetron...

Journal of Physics Conference Series 2012 / 11 Vol. 390

Indigenous development of ultra high vacuum (UHV) magnetron sputtering system for the preparation of Permalloy magnetic thin films

Khan, Jakeer, Selvakumar, N, Chowdhury, Prasanta, Barshilia, Harish C
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Volume:
390
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/390/1/012081
Date:
November, 2012
File:
PDF, 478 KB
english, 2012
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