Processing and characterisation of an etched groove...

Physica Scripta 1994 / 01 Vol. T54

Processing and characterisation of an etched groove permeable base transistor on 6H-SIC

Fröjdh, Christer, Thungström, Göran, Hatzikonstantinidou, Sofia, Nilsson, Hans-Erik, Petersson, C Sture
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Volume:
T54
Language:
english
Journal:
Physica Scripta
DOI:
10.1088/0031-8949/1994/t54/013
Date:
January, 1994
File:
PDF, 529 KB
english, 1994
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