Contacts to monocrystalline n- and p-type silicon by wafer...

Physica Scripta 1994 / 01 Vol. T54

Contacts to monocrystalline n- and p-type silicon by wafer bonding using cobalt disilicide

Thungström, Göran, Fröjdh, Christer, Svedberg, Per, Petersson, C Sture
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Volume:
T54
Language:
english
Journal:
Physica Scripta
DOI:
10.1088/0031-8949/1994/t54/018
Date:
January, 1994
File:
PDF, 312 KB
english, 1994
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