Patterning of sub-50 nm perpendicular CoFeB/MgO-based...

Nanotechnology 2016 / 05 Vol. 27; Iss. 18

Patterning of sub-50 nm perpendicular CoFeB/MgO-based magnetic tunnel junctions

Tryputen, Larysa, Tu, Kun-Hua, Piotrowski, Stephan K, Bapna, Mukund, Majetich, Sara A, Sun, Congli, Voyles, Paul M, Almasi, Hamid, Wang, Weigang, Vargas, Patricio, Tresback, Jason S, Ross, Caroline A
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Volume:
27
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/27/18/185302
Date:
May, 2016
File:
PDF, 2.00 MB
english, 2016
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