Study on organosilicon plasma polymers implanted by carbon...

Study on organosilicon plasma polymers implanted by carbon ions

Radeva, E, Yourukova, L, Kolentsov, K, Amov, B, Balabanov, S, Zhechev, D, Steflekova, V
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Volume:
113
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/113/1/012041
Date:
May, 2008
File:
PDF, 504 KB
english, 2008
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