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High Productivity DRIE solutions for 3D-SiP and MEMS Volume Manufacturing
Puech, M, Thevenoud, JM, Launay, N, Arnal, N, Godinat, P, Andrieu, B, Gruffat, JMVolume:
34
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/34/1/079
Date:
April, 2006
File:
PDF, 98 KB
english, 2006