![](/img/cover-not-exists.png)
Design and Simulation of Electro-fabricated MEMS Microhotplate for Gas Sensor Applications
Wisitsoraat, A, Tuantranont, A, Lomas, TVolume:
34
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/34/1/106
Date:
April, 2006
File:
PDF, 310 KB
english, 2006