Design and Simulation of Electro-fabricated MEMS...

Design and Simulation of Electro-fabricated MEMS Microhotplate for Gas Sensor Applications

Wisitsoraat, A, Tuantranont, A, Lomas, T
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Volume:
34
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/34/1/106
Date:
April, 2006
File:
PDF, 310 KB
english, 2006
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