Multibeam Electron Source using MEMS Electron Optical Components
Someren, B van, Bruggen, M J van, Zhang, Y, Hagen, C W, Kruit, PVolume:
34
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/34/1/180
Date:
April, 2006
File:
PDF, 263 KB
english, 2006