![](/img/cover-not-exists.png)
[IEEE 2015 IEEE 22nd International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) - Hsinchu (2015.6.29-2015.7.2)] 2015 IEEE 22nd International Symposium on the Physical and Failure Analysis of Integrated Circuits - Debug of implant angle deviation based on SIMS analysis
Jiang Bei Shi,, Zhen Yuan Li,, Xiao Gang Zheng,, AiMin Li,, Qi Hua Zhang,, Ming Li,, Wei Ting Chien,, Yao Bin Zhao,Year:
2015
Language:
english
DOI:
10.1109/ipfa.2015.7224373
File:
PDF, 319 KB
english, 2015