[IEEE IEEE International Symposium on Industrial Electronics. Proceedings. ISIE'98 - Pretoria, South Africa (7-10 July 1998)] IEEE International Symposium on Industrial Electronics. Proceedings. ISIE'98 (Cat. No.98TH8357) - Automation of an electron cyclotron resonance plasma system for the manufacturing of inhomogeneous optical coatings for sensor applications
Chtcherbakov, A.A., Swart, P.L., Lacquet, B.M., Bulkin, P.V.Volume:
1
Year:
1998
Language:
english
DOI:
10.1109/isie.1998.707804
File:
PDF, 570 KB
english, 1998