Surface-Passive Pressure Sensor by Femtosecond Laser Glass...

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Journal of Microelectromechanical Systems 2016

Surface-Passive Pressure Sensor by Femtosecond Laser Glass Structuring for Flip-Chip-in-Foil Integration

Schwerter, Martin, Grabner, Daniel, Hecht, Lars, Vierheller, Anke, Leester-Schadel, Monika, Dietzel, Andreas
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Year:
2016
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2016.2539202
File:
PDF, 3.23 MB
english, 2016
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